2/22/10	5:14:09 PM	Program started normally
2/22/10	5:14:10 PM	Helium valve closed
2/22/10	5:14:10 PM	H2 valve closed
2/22/10	5:14:10 PM	BCl3 valve closed
2/22/10	5:14:10 PM	PH3 valve closed
2/22/10	5:14:10 PM	SiCl4 pre valve closed
2/22/10	5:14:10 PM	SiCl4 post valve closed
2/22/10	5:14:10 PM	Main Vac valve closed
2/22/10	5:14:10 PM	Bypass valve closed
2/22/10	5:14:10 PM	Bubbler valve closed
2/22/10	5:14:10 PM	Helium MFC set to  0.000000
2/22/10	5:14:10 PM	H2 MFC set to  0.000000
2/22/10	5:14:10 PM	BCl3 MFC set to  0.000000
2/22/10	5:14:10 PM	SiCl4 MFC set to  0.000000
2/22/10	5:14:10 PM	Bypass solenoid MFC set to  760.000000
2/22/10	5:14:10 PM	Tube furnace set to 0
2/22/10	5:14:53 PM	Recipe started at 5:14 PM
2/22/10	5:14:53 PM	Helium valve closed
2/22/10	5:14:53 PM	BCl3 valve closed
2/22/10	5:14:53 PM	PH3 valve closed
2/22/10	5:14:53 PM	SiCl4 pre valve closed
2/22/10	5:14:53 PM	SiCl4 post valve closed
2/22/10	5:14:53 PM	Main Vac valve closed
2/22/10	5:14:53 PM	Bypass valve closed
2/22/10	5:14:53 PM	Bubbler valve closed
2/22/10	5:14:53 PM	H2 valve opened
2/22/10	5:14:53 PM	Helium MFC set to  0.000000
2/22/10	5:14:53 PM	H2 MFC set to  500.000000
2/22/10	5:14:53 PM	BCl3 MFC set to  0.000000
2/22/10	5:14:53 PM	SiCl4 MFC set to  0.000000
2/22/10	5:14:53 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:14:53 PM	Tube furnace set to 0
2/22/10	5:15:00 PM	Helium valve closed
2/22/10	5:15:00 PM	BCl3 valve closed
2/22/10	5:15:00 PM	PH3 valve closed
2/22/10	5:15:00 PM	SiCl4 pre valve closed
2/22/10	5:15:00 PM	SiCl4 post valve closed
2/22/10	5:15:00 PM	Main Vac valve closed
2/22/10	5:15:00 PM	Bypass valve closed
2/22/10	5:15:00 PM	H2 valve opened
2/22/10	5:15:00 PM	Bubbler valve opened
2/22/10	5:15:00 PM	Helium MFC set to  0.000000
2/22/10	5:15:00 PM	H2 MFC set to  500.000000
2/22/10	5:15:00 PM	BCl3 MFC set to  0.000000
2/22/10	5:15:00 PM	SiCl4 MFC set to  0.000000
2/22/10	5:15:00 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:15:00 PM	Tube furnace set to 0
2/22/10	5:15:06 PM	Helium valve closed
2/22/10	5:15:06 PM	BCl3 valve closed
2/22/10	5:15:06 PM	PH3 valve closed
2/22/10	5:15:06 PM	Main Vac valve closed
2/22/10	5:15:06 PM	Bypass valve closed
2/22/10	5:15:06 PM	H2 valve opened
2/22/10	5:15:06 PM	SiCl4 pre valve opened
2/22/10	5:15:06 PM	SiCl4 post valve opened
2/22/10	5:15:06 PM	Bubbler valve opened
2/22/10	5:15:06 PM	Helium MFC set to  0.000000
2/22/10	5:15:06 PM	H2 MFC set to  500.000000
2/22/10	5:15:06 PM	BCl3 MFC set to  0.000000
2/22/10	5:15:06 PM	SiCl4 MFC set to  325.000000
2/22/10	5:15:06 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:15:06 PM	Tube furnace set to 0
2/22/10	5:15:11 PM	H2 valve closed
2/22/10	5:15:11 PM	BCl3 valve closed
2/22/10	5:15:11 PM	PH3 valve closed
2/22/10	5:15:11 PM	SiCl4 pre valve closed
2/22/10	5:15:11 PM	SiCl4 post valve closed
2/22/10	5:15:11 PM	Main Vac valve closed
2/22/10	5:15:11 PM	Bypass valve closed
2/22/10	5:15:11 PM	Helium valve opened
2/22/10	5:15:11 PM	Bubbler valve opened
2/22/10	5:15:11 PM	Helium MFC set to  500.000000
2/22/10	5:15:11 PM	H2 MFC set to  0.000000
2/22/10	5:15:11 PM	BCl3 MFC set to  0.000000
2/22/10	5:15:11 PM	SiCl4 MFC set to  0.000000
2/22/10	5:15:11 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:15:11 PM	Tube furnace set to 0
2/22/10	5:15:16 PM	Helium valve closed
2/22/10	5:15:16 PM	H2 valve closed
2/22/10	5:15:16 PM	BCl3 valve closed
2/22/10	5:15:16 PM	PH3 valve closed
2/22/10	5:15:16 PM	SiCl4 pre valve closed
2/22/10	5:15:16 PM	SiCl4 post valve closed
2/22/10	5:15:16 PM	Main Vac valve closed
2/22/10	5:15:16 PM	Bypass valve closed
2/22/10	5:15:16 PM	Bubbler valve closed
2/22/10	5:15:16 PM	Helium MFC set to  0.000000
2/22/10	5:15:16 PM	H2 MFC set to  0.000000
2/22/10	5:15:16 PM	BCl3 MFC set to  0.000000
2/22/10	5:15:16 PM	SiCl4 MFC set to  0.000000
2/22/10	5:15:16 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:15:16 PM	Tube furnace set to 0
2/22/10	5:15:17 PM	Run finished at 5:15 PM
2/22/10	5:15:28 PM	Program exited cleanly
2/22/10	5:19:05 PM	Program started normally
2/22/10	5:19:06 PM	Helium valve closed
2/22/10	5:19:06 PM	H2 valve closed
2/22/10	5:19:06 PM	BCl3 valve closed
2/22/10	5:19:06 PM	PH3 valve closed
2/22/10	5:19:06 PM	SiCl4 pre valve closed
2/22/10	5:19:06 PM	SiCl4 post valve closed
2/22/10	5:19:06 PM	Main Vac valve closed
2/22/10	5:19:06 PM	Bypass valve closed
2/22/10	5:19:06 PM	Bubbler valve closed
2/22/10	5:19:06 PM	Helium MFC set to  0.000000
2/22/10	5:19:06 PM	H2 MFC set to  0.000000
2/22/10	5:19:06 PM	BCl3 MFC set to  0.000000
2/22/10	5:19:06 PM	SiCl4 MFC set to  0.000000
2/22/10	5:19:06 PM	Bypass solenoid MFC set to  760.000000
2/22/10	5:19:06 PM	Tube furnace set to 0
2/22/10	5:19:08 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/22/10	5:19:10 PM	Recipe started at 5:19 PM
2/22/10	5:19:11 PM	H2 valve closed
2/22/10	5:19:11 PM	BCl3 valve closed
2/22/10	5:19:11 PM	PH3 valve closed
2/22/10	5:19:11 PM	SiCl4 pre valve closed
2/22/10	5:19:11 PM	SiCl4 post valve closed
2/22/10	5:19:11 PM	Main Vac valve closed
2/22/10	5:19:11 PM	Bypass valve closed
2/22/10	5:19:11 PM	Bubbler valve closed
2/22/10	5:19:11 PM	Helium valve opened
2/22/10	5:19:11 PM	Helium MFC set to  500.000000
2/22/10	5:19:11 PM	H2 MFC set to  0.000000
2/22/10	5:19:11 PM	BCl3 MFC set to  0.000000
2/22/10	5:19:11 PM	SiCl4 MFC set to  0.000000
2/22/10	5:19:11 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:19:11 PM	Tube furnace set to 0
2/22/10	5:19:17 PM	Helium valve closed
2/22/10	5:19:17 PM	H2 valve closed
2/22/10	5:19:17 PM	BCl3 valve closed
2/22/10	5:19:17 PM	PH3 valve closed
2/22/10	5:19:17 PM	SiCl4 pre valve closed
2/22/10	5:19:17 PM	SiCl4 post valve closed
2/22/10	5:19:17 PM	Main Vac valve closed
2/22/10	5:19:17 PM	Bypass valve closed
2/22/10	5:19:17 PM	Bubbler valve closed
2/22/10	5:19:17 PM	Helium MFC set to  0.000000
2/22/10	5:19:17 PM	H2 MFC set to  0.000000
2/22/10	5:19:17 PM	BCl3 MFC set to  0.000000
2/22/10	5:19:17 PM	SiCl4 MFC set to  0.000000
2/22/10	5:19:17 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:19:17 PM	Tube furnace set to 0
2/22/10	5:19:17 PM	Run finished at 5:19 PM
2/22/10	5:19:17 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/22/10	5:19:29 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/22/10	5:19:32 PM	Recipe started at 5:19 PM
2/22/10	5:19:32 PM	Helium valve closed
2/22/10	5:19:32 PM	H2 valve closed
2/22/10	5:19:32 PM	BCl3 valve closed
2/22/10	5:19:32 PM	PH3 valve closed
2/22/10	5:19:32 PM	SiCl4 pre valve closed
2/22/10	5:19:32 PM	SiCl4 post valve closed
2/22/10	5:19:32 PM	Main Vac valve closed
2/22/10	5:19:32 PM	Bubbler valve closed
2/22/10	5:19:32 PM	Bypass valve opened
2/22/10	5:19:32 PM	Helium MFC set to  0.000000
2/22/10	5:19:32 PM	H2 MFC set to  0.000000
2/22/10	5:19:32 PM	BCl3 MFC set to  0.000000
2/22/10	5:19:32 PM	SiCl4 MFC set to  0.000000
2/22/10	5:19:32 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:19:32 PM	Tube furnace set to 0
2/22/10	5:19:34 PM	Helium valve closed
2/22/10	5:19:34 PM	H2 valve closed
2/22/10	5:19:34 PM	BCl3 valve closed
2/22/10	5:19:34 PM	PH3 valve closed
2/22/10	5:19:34 PM	SiCl4 pre valve closed
2/22/10	5:19:34 PM	SiCl4 post valve closed
2/22/10	5:19:34 PM	Bubbler valve closed
2/22/10	5:19:34 PM	Main Vac valve opened
2/22/10	5:19:34 PM	Bypass valve opened
2/22/10	5:19:34 PM	Helium MFC set to  0.000000
2/22/10	5:19:34 PM	H2 MFC set to  0.000000
2/22/10	5:19:34 PM	BCl3 MFC set to  0.000000
2/22/10	5:19:34 PM	SiCl4 MFC set to  0.000000
2/22/10	5:19:34 PM	Bypass solenoid MFC set to  0.000000
2/22/10	5:19:34 PM	Tube furnace set to 0
2/22/10	5:19:34 PM	Run finished at 5:19 PM
2/22/10	5:19:34 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/22/10	5:19:45 PM	Program exited cleanly
